10.6 MEMS accelerometer. The accelerometer in Figure 10.48 is designed to have unequal response in the two axes. The fle

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10 6 Mems Accelerometer The Accelerometer In Figure 10 48 Is Designed To Have Unequal Response In The Two Axes The Fle 1 (37.95 KiB) Viewed 35 times

10.6 MEMS accelerometer. The accelerometer in Figure 10.48 is designed to have unequal response in the two axes. The flexural members have a cross section of 5 μm x 5 μm and the mass is 2 g. The eight strain gauges are placed 10 µm from the ends of the flexural beams. Given an acceleration of 1 g at 45° to the x-axis in the x-y plane, calculate the strains measured by each of the eight strain gauges. The flexural members are silicon with a modulus of elasticity of 150 GPa. uni 29 Frame. 3 5 -Strain gauge 10 μm 45° Beam Mass 120 μm X