1. Create a mask set for PolyMUMPs that will produce a folded cantilever structure. The 3D and side views of the folded

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1 Create A Mask Set For Polymumps That Will Produce A Folded Cantilever Structure The 3d And Side Views Of The Folded 1 (196.68 KiB) Viewed 30 times

1. Create a mask set for PolyMUMPs that will produce a folded cantilever structure. The 3D and side views of the folded cantilever structure are shown in the figure (Be careful: The views are rough and not drawn to scale). The substrate (together with nitride) layer is also shown on the figures. The length and width of the upper cantilever should be 100 um and 8 um, respectively. The lower cantilever should be wider and longer than the upper one, but it should be as short and narrow as possible. You need to refer to PolyMUMPs Design Rules document, to apply the design rules correctly. You should submit the mask drawings, together with the side view after the application of each mask. You do not need to intermediate lithographic step (i.e. deposition of photoresist, exposure, etching, etc). Instead of the process, focus on the geometric details. You are not expected to use some of the masks, such as DIMPLES, HOLE?, METAL, etc.) Do not forget to include proper dimensioning at all your mask drawings.