1. You are asked to make a silicon diaphragm as shown below. Answer the following questions. (20) Side View 100 um 10 um

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1 You Are Asked To Make A Silicon Diaphragm As Shown Below Answer The Following Questions 20 Side View 100 Um 10 Um 1 (62.07 KiB) Viewed 12 times

1. You are asked to make a silicon diaphragm as shown below. Answer the following questions. (20) Side View 100 um 10 um 400 um 54.749 Top View (100) wafer X B (1) Find the Miller indices for directions a, b, c, d and planes A, B. (6) (2) What kind of etching technique should be used to produce this diaphragm? (2) (3) What kind of etch mask would you use for the etching and why? (2) (4) Microfabrication begins with photolithography. Calculate X for the photomask design. Show your work. (4) (5) Do you think Sol wafers are better than standard wafers for this application? Explain why or why not. (3) (6) Does this require backside aligning? Why or why not? (3)