MEMS
You are using KOH etching to define a 200 um thru-hole in a
<100> wafer. What should the dimensions on your mask be if
you are using a: a) 400 um thick wafer b) 600 um wafer. What would
be the dimensions of the thru-hole be if you used the mask intended
for the 400 um thick wafer on the 600 um thick wafer?
Thank you in advance!
MEMS You are using KOH etching to define a 200 um thru-hole in a <100> wafer. What should the dimensions on your mask be
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answerhappygod
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MEMS You are using KOH etching to define a 200 um thru-hole in a <100> wafer. What should the dimensions on your mask be
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