MEMS #7 (3 pts): You are asked to make a v-shaped groove 60 μm deep in an oxidized (100) silicon wafer Thank you in adva

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answerhappygod
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MEMS #7 (3 pts): You are asked to make a v-shaped groove 60 μm deep in an oxidized (100) silicon wafer Thank you in adva

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MEMS
#7 (3 pts): You are asked to make a v-shaped groove 60 μm deep
in an oxidized (100) silicon wafer
Thank you in advance!
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