MEMS Starting with a (100) wafer that is 500 μm thick calculate the time required to produce a 400 x 400 μm diaphragm th

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MEMS Starting with a (100) wafer that is 500 μm thick calculate the time required to produce a 400 x 400 μm diaphragm th

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MEMS
Starting with a (100) wafer that is 500 μm thick calculate the
time required to produce a 400 x 400 μm diaphragm that is 20 μm
thick. The etchant is KOH with an etch rate of 10 μm/h for the
(100) planes and an etch rate of 10nm/hr for the (111) plane.
Thank you in advance!
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