5. A square membrane with four piezoresistors is diagramed below. Resistors R1 and R4 are located on at the mid points o
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5. A square membrane with four piezoresistors is diagramed below. Resistors R1 and R4 are located on at the mid points o
5. A square membrane with four piezoresistors is diagramed below. Resistors R1 and R4 are located on at the mid points of two edges. Resistors R2 and R3 are located in the center of the membrane. The size of the membrane is b, and the thickness t. A pressure difference p is applied across the membrane. Find the ana- lytical expression of output voltage under two Wheatstone bridge configuration depicted in (a) and (b). R R R R =-= FO Sensor R Sensor R R2 R Z Vou Vou W Vin R3 R4 Vir RA R (a) (b) Figure 2
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