1. We want to design an in-plane (y-axis) accelerometer using the following structure. Find an accelerometer satisfying

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1 We Want To Design An In Plane Y Axis Accelerometer Using The Following Structure Find An Accelerometer Satisfying 1 (86.45 KiB) Viewed 255 times

1. We want to design an in-plane (y-axis) accelerometer using the following structure. Find an accelerometer satisfying following specs. Then, find (a) y-axis sensitivity (ACy/a) (b) crosstalk sensitivity between z-axis and y-axis, (ACz/ACy) (c) Describe a way to increase the y-axis sensitivity but reduce the crosstalk sensitivity. Use silicon parameter in problem 1 and density (2300 kg/m³). Damping factor = 0.7, bandwidth = 1kHz (defined when the TR=1/√2). Both the mass and beam has the same thickness=1mm. The mass is square area and 1mm width. The beam length is 1.5mm. The mass is one side of the two capacitive electrodes. The other electrode is 500x500μm² and located 10μm away from the mass. z↑ z Y-axis Electrode Z-axis Electrode