Ce2009mu A A Heater For A Semiconductor Wafer Has First Order Dynamics The Transfer Function Relating Changes In Temp 1 (53.38 KiB) Viewed 11 times
Ce2009mu A A Heater For A Semiconductor Wafer Has First Order Dynamics The Transfer Function Relating Changes In Temp 2 (53.38 KiB) Viewed 11 times
CE2009MU (a) A heater for a semiconductor wafer has first-order dynamics. The transfer function relating changes in temperature, T'(s), to changes in the heater input power level, Pl(s), is: T'(s) K P'() +1 EQUATION Q2.1 where Khas units (C kW-1) and t has units (min). The process is at steady state when an engineer changes the power input stepwise from 1 kW to 5 kW. The engineer notes the following: - The process temperature is initially at 80 °C. - Four minutes after changing the power input, the temperature rises to 230 °C. - The new steady state temperature is 280 °C. Answer the following questions and show all your workings. 0 Determine K and t in the process transfer function. Show all your workings. (6 marks) (ii) Determine the temperature at time t. (3 marks) (II) Plot the temperature as a function of time and state important characteristics of the process dynamics. (8 marks) (b) Explain the significance of the damping coefficient in the response of a second-order process to a step input. Sketch diagrams to support your answer (8 marks)
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