One step of the manufacturing of silicon solar cells is the molecular diffusion (doping) of elemental phosphorous (P) in

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One Step Of The Manufacturing Of Silicon Solar Cells Is The Molecular Diffusion Doping Of Elemental Phosphorous P In 1 (61.21 KiB) Viewed 39 times

One step of the manufacturing of silicon solar cells is the molecular diffusion (doping) of elemental phosphorous (P) into crystalline silicon to make an n-type semiconductor. This P-doped layer needs to be at least 0.5 um into the 250-um thick wafer. The maximum solubility of phosphorous within crystalline silicon is 1.0 x 1021 P atoms/cm3. Initially, there is no phosphorous impurity in the crystalline silicon. Using the coefficients in Table 24.7, calculate the temperature required for this system to reach a concentration of P atoms of 1.5 x 1020 cm-3 at a depth of 0.5 um after 30 min of exposure.