please answer (a) and (b)
(it's about oxidation)
2. (a) Estimate the linear and parabolic rate constant at 1000 and 1100 °C according to the data shown in the figure. (10 pts) (b) Follow (a), estimate the activation energy of the linear rate constant. (5 pts) 1.2 (100) Silicon Dry Oxidation 1.0 1200 C 0.8 1150 C Oxide Thickness (um) 1100 C 0.6 co 1050 C 0.4 1000 950 0.2 900 C 0 2 18 20 4 6 8 10 12 14 16 Oxidation Time (hours)
please answer (a) and (b) (it's about oxidation)
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