(1) (25%) Design of MOS Capacitor Consider an nt polysilicon gate and a p-type silicon substrate with a doping concentra
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(1) (25%) Design of MOS Capacitor Consider an nt polysilicon gate and a p-type silicon substrate with a doping concentra
(1) (25%) Design of MOS Capacitor Consider an nt polysilicon gate and a p-type silicon substrate with a doping concentration of N=3 x1016 cm- at room temperature. (a) Find the Fermi potential @F. (5%) (b) Find the maximum depletion width W under the strong inversion. (5%) (c) Find the maximum space charge Qd in the depletion region under the strong inversion. (5%) (d) Find the approximate electric field associated with Qd. (10%)
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