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1. I want to cut this full 4" wafer into 16 square size samples. Which direction should I cut and why? What would be the
Posted: Fri Apr 29, 2022 8:34 am
by answerhappygod
- 1 I Want To Cut This Full 4 Wafer Into 16 Square Size Samples Which Direction Should I Cut And Why What Would Be The 1 (75.1 KiB) Viewed 18 times
1. I want to cut this full 4" wafer into 16 square size samples. Which direction should I cut and why? What would be the size of each sample. Keep in mind material wastage should be minimal and this pieces will be used for making rectangular cavities with the help of KOH etching. {100} n-Type <110> 2 . < 90 This is one of the 16 square samples cut in the last question. Yellow color region is a square window. Rest of the sample is covered with 200 nm SiO2 (blue region). Bottom side of the full sample is Boron doped. (a) Suggest the process steps through which we can reach here from the sample made in 1st question. (b) If we perform KOH etching on this sample for long enough time, will it be a through hole? (c) How the bottom side of the cavity/hole will be oriented with respect to the sample?