MEMS Starting with a (100) wafer that is 500 μm thick calculate the time required to produce a 400 x 400 μm diaphragm th
Posted: Wed Apr 27, 2022 7:35 pm
MEMS
Starting with a (100) wafer that is 500 μm thick calculate the
time required to produce a 400 x 400 μm diaphragm that is 20 μm
thick. The etchant is KOH with an etch rate of 10 μm/h for the
(100) planes and an etch rate of 10nm/hr for the (111) plane.
Thank you in advance!
Starting with a (100) wafer that is 500 μm thick calculate the
time required to produce a 400 x 400 μm diaphragm that is 20 μm
thick. The etchant is KOH with an etch rate of 10 μm/h for the
(100) planes and an etch rate of 10nm/hr for the (111) plane.
Thank you in advance!