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In an optical proximity printing system, briefly discuss how resolution can change with resist thickness. For an exposur
Posted: Sun Jul 17, 2022 7:57 pm
by answerhappygod
- In An Optical Proximity Printing System Briefly Discuss How Resolution Can Change With Resist Thickness For An Exposur 1 (17.44 KiB) Viewed 34 times
In an optical proximity printing system, briefly discuss how resolution can change with resist thickness. For an exposure, the mask to wafer separation is 10 um and g-line exposure is used, what is the variation in resolution when a process using a 0.5 um-thick resist is changed to one using 2.5 um-thick resist? Assume k = 0.8.