To grow the polysilicon gate layer, which of the following chemical is used for chemical vapour deposition?
Posted: Thu Jul 14, 2022 11:10 am
a) Silicon Nitride(Si3N4)
b) Silane gas(SiH4)
c) Silicon oxide
d) None of the mentioned
b) Silane gas(SiH4)
c) Silicon oxide
d) None of the mentioned