Find the basic chemical reaction used for Epitaxial growth?

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answerhappygod
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Find the basic chemical reaction used for Epitaxial growth?

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a) Sic4 + 4H \(\longleftrightarrow\) Si + 4Hcl
b) Sic2 + H2 \(\longleftrightarrow\) Si + 2Hcl
c) Sic4 + H2 \(\longleftrightarrow\) Si + 4Hcl
d) 2Sic2 + 2H2 \(\longleftrightarrow\) 4Si + Hcl
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