Section B (total 25 marks for section B) a) An MOS capacitor has a p-type silicon semiconductor substrate doped with an
Posted: Tue Jun 07, 2022 12:57 pm
Section B (total 25 marks for section B) a) An MOS capacitor has a p-type silicon semiconductor substrate doped with an impurity concentration of 10¹8 cm³. Assume a poly-Si material is used for the gate. Draw a diagram of the capacitor structure showing material types and an energy band diagram when it is in thermal equilibrium. (10 marks) b) Given an MOS capacitor with a p-type silicon semiconductor substrate and poly- Si material as gate (in part a), what is the meaning of flat band condition? (5 marks) c) Given the MOS capacitor with a p-type silicon semiconductor substrate of an impurity concentration 10¹8 cm³ and poly-Si material as gate (in part a), calculate the flat band voltage VFB. (10 marks)