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7. A) Continuing from a pre-deposition of dopants to a substrate with a bulk concentration of 1016/cm³, a drive-in step
Posted: Tue May 24, 2022 11:24 am
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- 7 A Continuing From A Pre Deposition Of Dopants To A Substrate With A Bulk Concentration Of 1016 Cm A Drive In Step 1 (77.96 KiB) Viewed 24 times
7. A) Continuing from a pre-deposition of dopants to a substrate with a bulk concentration of 1016/cm³, a drive-in step at 1100 °C yields a final junction depth of 1.1415 μm and a surface concentration of 3 x 1017/cm³. Given that the Arrhenius activation energy is 3.56 eV and the Do is 0.32 cm²/s, determine the drive-in time (in hour). (6 points) B) Determine the total number of dopants per unit area introduced in this dual- diffusion process. (4 points)