Q10. (6+6+6-18 points) a) This problem deals with electromigration. A number of metal lines are stressed and the median
Posted: Wed May 04, 2022 1:44 pm
Q10. (6+6+6-18 points) a) This problem deals with electromigration. A number of metal lines are stressed and the median times to failure, fso, are determined. They are plotted in the Figure below. From these plots determine the activation energies (EA) or the three lines. I 150 (h) 10² 10¹ 10° 10-1 1.4 Al/2% Cu A1/0.5% Cu 1.6 00 1.8 2.5 μm Line Width ->> W 2 2.2 2.4 1000/T (K-¹) 2.6 pr LE