Which process is involved in growing the shaded region?

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answerhappygod
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Which process is involved in growing the shaded region?

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a) Chemical vapor deposition (CVD)
b) Sputtering and patterned by etching
c) Chemical vapor deposition (CVD) and patterned by HF acid etching
d) Chemical vapor deposition (CVD) and patterned by dry (plasma) etching
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