In MOS capacitor, the preference in dielectric layer is given to Silicon Nitride (Si3N4) because

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answerhappygod
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In MOS capacitor, the preference in dielectric layer is given to Silicon Nitride (Si3N4) because

Post by answerhappygod »

a) It makes capacitor non-polar
b) It contain a small resistance
c) It offers less processing step
d) It reduces failure mechanism
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