a) Bi-borane (B2H2)
b) Phosphine (PH3)
c) Boron chloride (BCl3)
d) Phosphorous pentoxide (P2O5)
Which component is added to the p-type material in order to get the impurity concentration in epitaxial films?
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Which component is added to the p-type material in order to get the impurity concentration in epitaxial films?
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