3. (20 pts) A MEMS accelerometer has a seismic mass of lg, a stiffness of 10N/m, and is critically-damped. Its capacitiv

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3. (20 pts) A MEMS accelerometer has a seismic mass of lg, a stiffness of 10N/m, and is critically-damped. Its capacitiv

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3 20 Pts A Mems Accelerometer Has A Seismic Mass Of Lg A Stiffness Of 10n M And Is Critically Damped Its Capacitiv 1
3 20 Pts A Mems Accelerometer Has A Seismic Mass Of Lg A Stiffness Of 10n M And Is Critically Damped Its Capacitiv 1 (23.7 KiB) Viewed 23 times
3. (20 pts) A MEMS accelerometer has a seismic mass of lg, a stiffness of 10N/m, and is critically-damped. Its capacitive Wheatstone bridge is excited by a sinusoidal voltage with amplitude 1V, and with a carrier frequency that is 100 times the natural frequency of the accelerometer. The Wheatstone bridge draws a current with an amplitude of 104A. Find the equilibrium value (i.e., the value under zero acceleration) for each of the four capacitors in the bridge. (Answer: 10pF]
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